@article{696d704d996d40cbbdfee06abadfe213,
title = "Scanning probe microscopy and spectroscopy: From basic research to industrial applications",
abstract = "An overview of industrial applications of scanning probe microscopy (SPM) is given. The first part describes possible applications for the fabrication of semiconductor devices by SPM-methods and the use of SPM-based techniques for an ultra high density storage (UHDS) device. The second part shows the ability of SPMs as a characterization tool for integrated circuits (ICs). They can be used in defect analysis, process characterization, and monitoring. And they offer the measurement of each significant value with a spatial dimension of less than 100 nm. So the SPM is useful for a fab today, and irreplaceable for a fab in the future.",
keywords = "Atomic force microscopy, Lithography, Local anodic, Atomic Force Microscopy, Self Assembled Monolayers, Molecules, Atomic force microscopy, Lithography, Local anodic, Atomic Force Microscopy, Self Assembled Monolayers, Molecules",
author = "Axel Born and Roland Wiesendanger",
note = "Anzahl Autoren: 2 | Vedmedenko, E. Y.| Schult, M.| Kronjaeger, J.| Wiesendanger, R.| Bongs, K.| Sengstock, K.",
year = "1997",
month = dec,
language = "English",
volume = "27",
pages = "246--250",
journal = "Informacije MIDEM",
issn = "0352-9045",
publisher = "Society for Microelectronics, Electric Components and Materials",
number = "4",
}
