@misc{0960b016750c46cda5e27f6c0658d134,
title = "STEP-WISE FORMATION OF A THREE-DIMENMSIONAL STRUCTURE EMPLOYING DIFFERENT RESOLUTIONS",
abstract = "A method of step-wise exposing a voxel of a resist to radiation for forming a three-dimensional structure, the method comprising setting a step size to a first resolution; setting a voxel volume to a first volume; exposing a first set of voxels of said first volume to radiation using said first resolution; setting the step size to a second resolution being smaller than said first resolution, or, respectively, greater than said first resolution; setting the voxel volume to a second volume being smaller than said first volume, or, respectively, greater than said first volume; and exposing a second set of voxels of said second volume to radiation using said second resolution.",
author = "Robert Blick and Stefanie Haugg and Robert Zierold",
year = "2021",
month = oct,
day = "7",
language = "English",
type = "Patent",
note = "WO2021198246; B33Y 10/ 00 A I",
}